Convey Technology
Cleanroom Inspection Tools
R3 Measured Molecular Residue
XPS shows rolling R3 on clean silicon dioxide deposits less than 0.3 monolayers of carbon, no detectable silicones, nitrogen, fluorine, or metals.
R3 Measured Particle Pickup
90% of .3um polystyrene latex spheres (PSL) and >95% of 2um PSL on native oxide silicon are picked in one pass with an R3 sampler.
Mycroft 5
The Mycroft 5 is a portable scanner for samplers. The oscilloscope interface indicates pass/fail for added particles to a sampler using stored control limits. It can also provide more detailed reporting. The user interface and additional information may be viewed by
clicking here.
Mycroft 5 Specifications
Particle Sensitivity 0.3 micron (equivalent PSL)
Throughput 2 minutes per scan
Mechanical 9"W x 14"H x 15"L
Weight 14 pounds
User interface 10" diagonal VGA color touch screen
Utilities 300 VA, 50/60Hz, 110/220 VAC
Protected by one or more of the following US patents, 6697152, 6449035 or patents pending.